Applications: The GALVA series consists of vertical linear positioning stages driven by a servo motor, with a wide range of usage, commonly used in applications with height limited or with stacking of multiple positioning stages, including wafer testing, surface metrology, laser micro machining, precision manufacturing, etc.
Structure Features: The solid and reliable mechanical structure, low friction resistance, anti-creep crossed-roller bearing rail for guide, precisely-ground ball screw drive, high-rigidity aviation aluminum alloy base, and high-performance servo motor provide it with an extra-long service life and consistent positioning performance.
Accuracy: The high-performance servo motor and optional grating ruler, can achieve sub-micron repeatability.
Flexible Customization and Integration: The GALVA series is designed with multiple standard functions and options to meet users’diverse needs and configurations requirements, allowing rapid system development, which greatly reduces the workload of design and development and improves the work efficiency.
Note: The accuracy is measured at 25mm above the load table. Note: The quotation does not include the controller.
| Precisely-ground ball screw and low-friction resistance, and anti-creep crossed-roller bearing rail for guide； |
| Excellent geometric performance, excellent minimum increment step size and in-place stability； |
| Closed-loop feedback of grating ruler； |
| Compatibility with vacuum . |
