Applications: The GALSAR series is a sub-micron linear positioning stage driven by a servo motor, widely used in laser processing, precision metrology, inspection, electronic circuit board manufacturing and inspection, semiconductor manufacturing, etc.
Structure Features: The solid and reliable mechanical structure, low-friction resistance linear rail, precisely-ground ball screw drive, optimized side seal design, high-rigidity aviation aluminum alloy base, and high-performance servo motor provide it with an extra-long service life and consistent positioning performance.
Accuracy: The high-performance servo motor and optional grating ruler can achieve a sub-micron repeatability.
Flexible Customization and Integration: The GALSAR Series is designed with multiple standard functions and options to users’ diverse needs and configurations requirements, enabling rapid system development, greatly reducing work load in design and development and improving the work efficiency.
Note: The accuracy is measured at 25mm above the load table. Note: The quotation does not include the controller.
| Precisely-ground ball screw and low-friction resistance linear rail; |
| Excellent mechanical rigidity, high precision and sub-micron repeatability; |
| Dust-proof design, effectively preventing particulate dust and processing debris from entering the system; |
| Motor power-off brake function; |
| Optional closed-loop feedback of grating ruler; |
| Vacuum and cleanroom compatibility available. |